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TERA TECHNOLOGY Co., Ltd.
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    Anodizing

    AMICUS CO., LTD.

    Organization Facilities Process Technology Product
    Company
    • Entire production site (1)
    • Entire production site (2)
    • Production site(detailed) : Soft Anodizing Bath
    • Production site(detailed) : Hard Anodizing Bath
    • Production site(detailed) : Oxalic Acid Anodizing Bath
    • Production site(detailed) : Sealing Bath
    • Production site(detailed) : DI extractor
    • Production site(detailed) : Bead Blast
    Production support
    • Bead Blast
    • Quality management (Inspection)
    • Inspection Equipment: Withstand Voltage Tester
    • Inspection equipment: Plating thickness meter (X-Ray)
    • Inspection equipment: Liquid management analyzer (atomic absorption spectrophotometer)
    • Inspection Equipment: Plating Thickness Meter (Portable)
    • Inspection equipment: Film cutter
    • Inspection equipment: Electron microscope
    • Inspection equipment: Roughness meter
    • Inspection equipment: PH meter
    ANODIZING PROCESS FLOW(NEW)
    • 01 Incoming Inspection (IQC)

      Check product status before anodizing

    • 02 Masking

      Taping using special film

    • 03 Cleaning / Etching / Rinse

      Removing contaminants from the product surface

    • 04 Anodizing

      Forming an insulating layer on the surface of the product

    • 05 Rinse

      Removing contaminants from the anodizing surface

    • 06 Sealing

      Improving corrosion resistance and abrasion resistance by forming a thin coating film on the anodizing surface

    • 07 Drying (Baking)

      Drying the product at the room temperature or in an oven for a certain period of time

    • 08 Final Inspection (FQC)

      Final check for abnormalities on the finished product
      - Anodizing Thickness
      - Surface roughness (Ra)
      - Exterior

    BEAD BLAST PROCESS FLOW
    • 01 Incoming Inspection (IQC)

      Check product status before Bead Blast

    • 02 Masking

      Taping using special film

    • 03 Bead Blast

      Surface treatment using abrasives

    • 04 Drying (Baking)

      Drying the product at the room temperature or in an oven for a certain period of time

    • 05 Final Inspection (FQC)

      Final check for abnormalities on the finished product
      - Surface roughness (Ra)
      - Exterior

    • Anodizing
    • Anodizing Repair
    • Various surface treatment technologies
    • Bead Blast

    Anodizing

    - Hard Anodizing
    - Soft Anodizing
    - Oxalic Acid Anodizing

    Anodizing Repair

    - Anodizing regeneration technology for expired ESCs and chambers
    - Partial anodizing regeneration technology for damaged anodizing parts

    Various surface treatment technologies other than electro polishing

    - Process technology for electro polishing
    - ESD (Electro Static Discharge) process technology

    Bead Blast

    - Bead Blast process technology

    What is anodizing?

    To form an oxide film(AL2O3) on the surface of aluminum(AL) products to prevent oxidation and increase durability

    Types of anodizing

    종류

    Hard Anodizing

    Soft Anodizing

    Oxalic Anodizing

    이미지
    Description A surface treatment method used to improve functional properties such as hardness, corrosion resistance, abrasion resistance, and electrical insulation of the aluminum surface Coating method for protection and decoration of aluminum It is a surface treatment method widely used for product advancement due to its excellent decorative properties as it can be color treated with various dyes after film treatment. Anodizing method mainly used in Japan For high-purity AL, the film with the best hardness and corrosion resistance can be obtained.
    Features 1. Thick coating layer(Al2O3)
    2. Functional properties(hardness, corrosion resistance, abrasion resistance, etc.) are significantly improved.
    1. Thin coating layer(Al2O3)
    2. Excellent corrosion prevention and insulation effect.
    1. The best mechanical strength such as the best hardness and corrosion resistance can be obtained.
    2. High-strength film and gloss can be obtained even with low-purity AL.
    3. Maintenance cost is high.
    Film thickness(㎛)) 25~120㎛ 10~25㎛ 10~100㎛
    Surface hardness(Hv) 250~260Hv(Based on 50㎛) 150~270Hv(Based on 20㎛) 300~800Hv(Based on 50㎛)
    Corrosion resistance (salt spray test) Over 8,600 hr.(Based on 50㎛) Over 5,000 hr. (Based on 20㎛) Over 10,000 hr. (Based on 50㎛)

    Reference(Semiconductor / ESC Chuck)Applied , etc.

    Reference(Semiconductor / Chamber)Applied , etc.

    Reference(Semiconductor / Liner)

    Reference(Semiconductor / Heater)